Model-free deflectometry for freeform optics measurement using iterative reconstruction technique

  • Logan R. Graves (Creator)
  • Heejoo Choi (Contributor)
  • Chang Jin Oh (Creator)
  • Peng Su (ASML Netherlands BV) (Creator)
  • Tianquan Su (Creator)
  • Daewook Kim (Creator)
  • Chang Jin Oh (Creator)

Dataset

Description

We present a novel model-free iterative data processing approach which improves surface reconstruction accuracy for deflectometry tests of unknown surfaces. This new processing method iteratively reconstructs the surface leading to reduced error in the ...
Date made available2018
Publisherfigshare

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