Parametric modeling of edge effects for polishing tool influence functions

Daewook Kim (Creator)
Won Hyun Park (Creator)
Sug Whan Kim (Creator)
James H. Burge (Creator)

Agriculture and Life Sciences, College of
Optical Sciences
Optical Sciences, College of

Dataset

Description

Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston’s model for material removal allows the TIF to be determined for most cases, nonlinear removal behav...

Date made available	2009
Publisher	figshare

DOI
10.6084/m9.figshare.c.3762296.v1

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CC BY

1 Article

Parametric modeling of edge effects for polishing tool influence functions
Kim, D. W., Park, W. H., Kim, S. W. & Burge, J. H., Mar 30 2009, In: Optics Express. 17, 7, p. 5656-5665 10 p.
Research output: Contribution to journal › Article › peer-review

Open Access
84 Scopus citations

Parametric modeling of edge effects for polishing tool influence functions

Description

DOI

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Parametric modeling of edge effects for polishing tool influence functions

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