Rigid conformal polishing tool using
non-linear visco-elastic effect

  • Dae Wook Kim (Creator)
  • James H. Burge (Creator)

Dataset

Description

Computer controlled optical surfacing (CCOS) relies on a stable and predictable tool influence function (TIF), which is the shape of the wear function created by the machine. For a polishing lap, which is stroked on the surface, both the TIF stability a...
Date made available2010
Publisherfigshare

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