Rigid conformal polishing tool using non-linear visco-elastic effect

Daewook Kim (Creator)
James H. Burge (Creator)

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2010
Rigid conformal polishing tool using non-linear visco-elastic effect
Kim, D. W. & Burge, J. H., Feb 1 2010, In: Optics Express. 18, 3, p. 2242-2257 16 p.
Research output: Contribution to journal › Article › peer-review

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