Grant Details
| Status | Active |
|---|---|
| Effective start/end date | 10/1/22 → 3/29/24 |
Funding
- INDUSTRY: Domestic Company: $120,000.00
Si Surface Chemistry Studies for Advanced Logic-node Manufacturing
- Nemanich, Robert (PI)
Project: Research project
Project: Research project
| Status | Active |
|---|---|
| Effective start/end date | 10/1/22 → 3/29/24 |