Grant Details
| Status | Finished |
|---|---|
| Effective start/end date | 10/1/23 → 9/30/24 |
Si Surface Chemistry Studies for Advanced Logic-node Manufacturing
- Nemanich, Robert (PI)
Project: Research project
Project: Research project
| Status | Finished |
|---|---|
| Effective start/end date | 10/1/23 → 9/30/24 |