计算机辅助光学偏折测量技术研究进展

As a high-precision non-contact measurement method, the deflectometric measurement technology can achieve the testing without damaging the surface of the measured components, and it has a high spatial resolution and a large dynamic range. The deflectometric measurement system is simple in configuration, and it has a good application prospect in the field of complex optical freeform surface measurement, which requires high precision, high efficiency, and high versatility. This paper firstly reviews the complex surface measurement methods in recent years and analyzes the corresponding measuring characteristics. Then, it focuses on the introduction to the computer-aided deflectometric measurement technology and the key performance parameters in the computer-aided deflectometric measurement system. After that, the research progress in the key techniques in the deflectometric measurement is discussed, including the measurement model construction, geometrical error calibration, phase acquisition, and surface reconstruction. Finally, the typical applications of computer-aided deflectometric measurement technology are summarized.