3D out-of-plane rotational etching with pinned catalysts in metal-assisted chemical etching of silicon

Keyphrases

• Metal-assisted Chemical Etching 100%
• Micro-nano Structure 66%
• Sub-micro 66%
• Sub-microstructure 66%
• Delamination 33%
• Metal Structure 33%
• Swinging 33%
• Vertically Oriented 33%
• Rotation Angle 33%
• In-plane Bending 33%
• Shaped Catalysts 33%
• Etching Mode 33%
• Thin Element 33%
• Feature Fidelity 33%

Material Science

• Silicon 100%
• Chemical Etching 100%
• Nanostructure 28%
• Delamination 14%