TY - GEN
T1 - Accuracy and repeatability of automated non-contact probes for on-wafer characterization
AU - Caglayan, Cosan
AU - Trichopoulos, Georgios C.
AU - Sertel, Kubilay
N1 - Publisher Copyright: © 2014 IEEE.
PY - 2014/1/16
Y1 - 2014/1/16
N2 - We present significant performance improvements of non-contact probes for the mmW and sub-mmW device characterization. Repeatability and accuracy of the measurement setup is studied using an automated non-contact probe system and compared with conventional contact-probes. Owing to the planar, non-contact nature of the new setup, only 2-axis automated positioning is required, as compared to typical 3-axis manipulators, including precise contact-force control used in commercially available systems. We demonstrate repeatability studies for the 140-220 GHz band using a precision servo system, which can be fully automated using a software-controlled aligner for wafer-scale measurements. This fully-automated system also allows for periodic re-calibrations that are typically required for reliable sub-mmW measurements.
AB - We present significant performance improvements of non-contact probes for the mmW and sub-mmW device characterization. Repeatability and accuracy of the measurement setup is studied using an automated non-contact probe system and compared with conventional contact-probes. Owing to the planar, non-contact nature of the new setup, only 2-axis automated positioning is required, as compared to typical 3-axis manipulators, including precise contact-force control used in commercially available systems. We demonstrate repeatability studies for the 140-220 GHz band using a precision servo system, which can be fully automated using a software-controlled aligner for wafer-scale measurements. This fully-automated system also allows for periodic re-calibrations that are typically required for reliable sub-mmW measurements.
UR - https://www.scopus.com/pages/publications/84946689477
UR - https://www.scopus.com/pages/publications/84946689477#tab=citedBy
U2 - 10.1109/ARFTG.2014.7013406
DO - 10.1109/ARFTG.2014.7013406
M3 - Conference contribution
T3 - 84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014
BT - 84th ARFTG Microwave Measurement Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 84th ARFTG Microwave Measurement Conference, ARFTG 2014
Y2 - 4 December 2014 through 5 December 2014
ER -