Apparatus and Process for Performing Low Temperature Atmospheric Plasma Surface Treatments

Terry Alford (Inventor)

Research output: Patent


This invention is a dialectric barrier discharge apparatus to be used for producing an AC plasma discharge at ambient temperatures and near atmospheric conditions. It is composed of several metallic electrodes facing each other. The dialectric material of one electrode has been machined or chemically etched to form a capillary of specified geometry aspect ratio Z:X between the dialectric surface and the metallic electrode. An emitter material of specified work function range and aspect ratio Y:X and specified density is formed within the capillaries to cause electron emission when sufficient AC voltage and frequency are applied. Chemically oxidizing or reducing gases and ionizing gases are introduced between the electrodes to form a low temperature atmospheric (LTA) homogenous discharge chemical plasma within the discharge region. The exposure of surface materials to LTA plasmas can be used for a multitude of surface treatments - modification, cleaning, disinfecting, decontamination, or selective chemical removal of surface materials.
Original languageEnglish (US)
StatePublished - May 18 2004


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