@inproceedings{c12f04a0939040e587c24867ca627e93,
title = "Beam aberration analysis of differential wavefront interferometry",
author = "Xiangzhi Yu and Gillmer, {Steven R.} and Chen Wang and Ellis, {Jonathan D.}",
year = "2014",
language = "English (US)",
series = "Proceedings - ASPE 2014 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "412--416",
booktitle = "Proceedings - ASPE 2014 Annual Meeting",
note = "29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014 ; Conference date: 09-11-2014 Through 14-11-2014",
}