@inproceedings{c77c983bd0744367a4f72c8b2a7be4b7,
title = "Compact six degree-of-freedom interferometer for precision linear stage metrology",
author = "Xiangzhi Yu and Gillmer, {Steven R.} and Howard, {Stephen C.} and Woody, {Shane C.} and Ellis, {Jonathan D.}",
year = "2015",
language = "English (US)",
series = "Proceedings - ASPE 2015 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "415--418",
booktitle = "Proceedings - ASPE 2015 Annual Meeting",
note = "30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 ; Conference date: 01-11-2015 Through 06-11-2015",
}