Consistent optical and electrical determination of carrier concentrations for the accurate modeling of the transport properties of n-type Ge

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1 Scopus citations

Abstract

A consistent methodology is presented to extract carrier concentrations in n-type Ge from measurements of the infrared dielectric function and the Hall effect. In the case of the optical measurements—usually carried out using spectroscopic ellipsometry—the carrier concentration is affected by the doping dependence of the conductivity effective mass, which is computed using a model of the electronic density of states that accounts for non-parabolicity and is fit to electronic structure calculations. Carrier concentrations obtained from Hall measurements require a knowledge of the Hall factor, which is arbitrarily set equal to unit in most practical applications. We have calculated the Hall factor for n-Ge using a model that accounts for scattering with phonons and with ionized impurities. We show that determinations of the carrier concentration n using our computed effective mass and Hall factor virtually eliminates any systematic discrepancy between the two types of measurement. We then use these results to compute majority carrier mobilities from measured resistivity values, to compare with measurements of minority carrier mobilities, and to fit empirical expressions to the doping dependence of the mobilities that can be used to model Ge devices.

Original languageEnglish (US)
Article number107596
JournalMaterials Science in Semiconductor Processing
Volume164
DOIs
StatePublished - Sep 2023

Keywords

  • Doping
  • Ellipsometry
  • Germanium
  • Hall effect
  • Mobility

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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