Contact resistance of silicon-polysilicon interconnection for different current-flow geometries

A. J. Walton; R. Holwill

doi:10.1049/el:19850009

Contact resistance of silicon-polysilicon interconnection for different current-flow geometries

A. J. Walton, R. Holwill

Arizona State University

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The relationship between contact window dimensions, specific contact resistivity pc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρ_c starts to become the dominant factor giving contact resistances independent of the direction of current flow.

Original language	English (US)
Pages (from-to)	13-14
Number of pages	2
Journal	Electronics Letters
Volume	21
Issue number	1
DOIs	https://doi.org/10.1049/el:19850009
State	Published - Jan 3 1985

Keywords

Contact resistance
Integrated circuits

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1049/el:19850009

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title = "Contact resistance of silicon-polysilicon interconnection for different current-flow geometries",

abstract = "The relationship between contact window dimensions, specific contact resistivity pc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρc starts to become the dominant factor giving contact resistances independent of the direction of current flow.",

keywords = "Contact resistance, Integrated circuits",

author = "Walton, {A. J.} and R. Holwill",

year = "1985",

month = jan,

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doi = "10.1049/el:19850009",

language = "English (US)",

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T1 - Contact resistance of silicon-polysilicon interconnection for different current-flow geometries

AU - Walton, A. J.

AU - Holwill, R.

PY - 1985/1/3

Y1 - 1985/1/3

N2 - The relationship between contact window dimensions, specific contact resistivity pc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρc starts to become the dominant factor giving contact resistances independent of the direction of current flow.

AB - The relationship between contact window dimensions, specific contact resistivity pc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρc starts to become the dominant factor giving contact resistances independent of the direction of current flow.

KW - Contact resistance

KW - Integrated circuits

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JO - Electronics Letters

JF - Electronics Letters

IS - 1

ER -

Contact resistance of silicon-polysilicon interconnection for different current-flow geometries

Abstract

Keywords

ASJC Scopus subject areas

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