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Control of composition and crystallinity in the molecular beam epitaxy of strain-compensated Si1 -x-yGexCy alloys on Si

  • E. T. Croke
  • , A. T. Hunter
  • , C. C. Ahn
  • , T. Laursen
  • , D. Chandrasekhar
  • , A. E. Bair
  • , David Smith
  • , J. W. Mayer

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Material Science