Abstract
In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.μm-thick Si 3N 4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.
| Original language | English (US) |
|---|---|
| Article number | 46 |
| Pages (from-to) | 373-381 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5592 |
| DOIs | |
| State | Published - 2005 |
| Event | Nanofabrication: Technologies, Devices, and Applications - Philadelphia, PA, United States Duration: Oct 25 2004 → Oct 28 2004 |
Keywords
- Design
- Measurement
- Micro/nano-structures
- Nanofabrication
- Optical lithography
- Optical resonance
- Sensors
- Simulation
- Waveguide
- Whispering-gallery mode
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering