Determining an appropriate number of foups in semiconductor wafer fabrication facilities

Jens Zimmermann; Lars Mönch; Scott J. Mason; John Fowler

doi:10.1109/WSC.2008.4736315

Determining an appropriate number of foups in semiconductor wafer fabrication facilities

Jens Zimmermann, Lars Mönch, Scott J. Mason, John Fowler

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

In this paper, multiple orders per job type formation and release strategies are described for semiconductor wafer fabrication facilities (wafer fabs). Different orders are grouped into one job because orders of an individual customer very often fill only a portion of a Front-Opening Unified Pod (FOUP). A FOUP is assigned to each job and is used to move the job throughout the wafer fab after the job formation. We determine an appropriate number of FOUPs for a given order release rate that will yield acceptable values for on-time delivery performance, cycle time, and throughput via discrete event simulation.

Original language	English (US)
Title of host publication	Proceedings of the 2008 Winter Simulation Conference, WSC 2008
Pages	2164-2170
Number of pages	7
DOIs	https://doi.org/10.1109/WSC.2008.4736315
State	Published - 2008
Event	2008 Winter Simulation Conference, WSC 2008 - Miami, FL, United States Duration: Dec 7 2008 → Dec 10 2008

Publication series

Name	Proceedings - Winter Simulation Conference

Other

Other	2008 Winter Simulation Conference, WSC 2008
Country/Territory	United States
City	Miami, FL
Period	12/7/08 → 12/10/08

ASJC Scopus subject areas

Software
Modeling and Simulation
Computer Science Applications

Access to Document

10.1109/WSC.2008.4736315

Cite this

Determining an appropriate number of foups in semiconductor wafer fabrication facilities. / Zimmermann, Jens; Mönch, Lars; Mason, Scott J. et al.
Proceedings of the 2008 Winter Simulation Conference, WSC 2008. 2008. p. 2164-2170 4736315 (Proceedings - Winter Simulation Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zimmermann, J, Mönch, L, Mason, SJ & Fowler, J 2008, Determining an appropriate number of foups in semiconductor wafer fabrication facilities. in Proceedings of the 2008 Winter Simulation Conference, WSC 2008., 4736315, Proceedings - Winter Simulation Conference, pp. 2164-2170, 2008 Winter Simulation Conference, WSC 2008, Miami, FL, United States, 12/7/08. https://doi.org/10.1109/WSC.2008.4736315

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Determining an appropriate number of foups in semiconductor wafer fabrication facilities

Abstract

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ASJC Scopus subject areas

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