TY - JOUR
T1 - Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
AU - Yu, Xiangzhi
AU - Gillmer, Steven R.
AU - Woody, Shane C.
AU - Ellis, Jonathan D.
N1 - Funding Information: The authors would like to thank Chen Wang from the University of Rochester and Dr. Stephen C. Howard of InSituTec Incorporated for the fruitful discussions regarding this work. The authors would like to acknowledge the support of the US Department of Commerce, National Institute of Standards and Technology under Award No. 70NANB12H186 and Award No. 70NANB14H266, and the National Science Foundation under Award Nos. CMMI:1265824 and IIP:1417032. Publisher Copyright: © 2016 Author(s).
PY - 2016/6/1
Y1 - 2016/6/1
N2 - A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 μm in straightness, 0.14 μrad in pitch, 0.44 μradin yaw, and 45.8 μrad in roll.
AB - A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 μm in straightness, 0.14 μrad in pitch, 0.44 μradin yaw, and 45.8 μrad in roll.
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U2 - 10.1063/1.4953335
DO - 10.1063/1.4953335
M3 - Article
SN - 0034-6748
VL - 87
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 6
M1 - 065109
ER -