Development of a portable deflectometry system for high spatial resolution surface measurements

Alejandro V. Maldonado; Peng Su; James H. Burge

doi:10.1364/AO.53.004023

Development of a portable deflectometry system for high spatial resolution surface measurements

Alejandro V. Maldonado, Peng Su, James H. Burge

Optical Sciences, College of

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

The Slope-Measuring Portable Optical Test System (SPOTS) is a new, portable, high-resolution, deflectometry device that achieves mid to high (20 to 1000 cyc/m) spatial frequency optical surface metrology with very little filtering and very little noise. Using a proof of concept system, we achieved 1 nm RMS surface accuracy for mid to high spatial frequencies, and 300 nrad RMS slope precision. SPOTS offers a turnkey solution for measuring errors on a wide variety of optical surfaces including the large mirrors fabricated at The University of Arizona. This paper defines and discusses SPOTS, including the principles of operation, measurement modes, design, performance, error analysis, and experimental results.

Original language	English (US)
Pages (from-to)	4023-4032
Number of pages	10
Journal	Applied optics
Issue number	18
DOIs	https://doi.org/10.1364/AO.53.004023
State	Published - Jun 20 2014

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

Access to Document

10.1364/AO.53.004023

Cite this

@article{6a2f7319a0754fddb15720d99030c7f5,

title = "Development of a portable deflectometry system for high spatial resolution surface measurements",

abstract = "The Slope-Measuring Portable Optical Test System (SPOTS) is a new, portable, high-resolution, deflectometry device that achieves mid to high (20 to 1000 cyc/m) spatial frequency optical surface metrology with very little filtering and very little noise. Using a proof of concept system, we achieved 1 nm RMS surface accuracy for mid to high spatial frequencies, and 300 nrad RMS slope precision. SPOTS offers a turnkey solution for measuring errors on a wide variety of optical surfaces including the large mirrors fabricated at The University of Arizona. This paper defines and discusses SPOTS, including the principles of operation, measurement modes, design, performance, error analysis, and experimental results.",

author = "Maldonado, {Alejandro V.} and Peng Su and Burge, {James H.}",

note = "Publisher Copyright: {\textcopyright} 2014 Optical Society of America.",

year = "2014",

month = jun,

day = "20",

doi = "10.1364/AO.53.004023",

language = "English (US)",

pages = "4023--4032",

journal = "Applied optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "18",

}

TY - JOUR

T1 - Development of a portable deflectometry system for high spatial resolution surface measurements

AU - Maldonado, Alejandro V.

AU - Su, Peng

AU - Burge, James H.

PY - 2014/6/20

Y1 - 2014/6/20

N2 - The Slope-Measuring Portable Optical Test System (SPOTS) is a new, portable, high-resolution, deflectometry device that achieves mid to high (20 to 1000 cyc/m) spatial frequency optical surface metrology with very little filtering and very little noise. Using a proof of concept system, we achieved 1 nm RMS surface accuracy for mid to high spatial frequencies, and 300 nrad RMS slope precision. SPOTS offers a turnkey solution for measuring errors on a wide variety of optical surfaces including the large mirrors fabricated at The University of Arizona. This paper defines and discusses SPOTS, including the principles of operation, measurement modes, design, performance, error analysis, and experimental results.

AB - The Slope-Measuring Portable Optical Test System (SPOTS) is a new, portable, high-resolution, deflectometry device that achieves mid to high (20 to 1000 cyc/m) spatial frequency optical surface metrology with very little filtering and very little noise. Using a proof of concept system, we achieved 1 nm RMS surface accuracy for mid to high spatial frequencies, and 300 nrad RMS slope precision. SPOTS offers a turnkey solution for measuring errors on a wide variety of optical surfaces including the large mirrors fabricated at The University of Arizona. This paper defines and discusses SPOTS, including the principles of operation, measurement modes, design, performance, error analysis, and experimental results.

UR - http://www.scopus.com/inward/record.url?scp=84942370508&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84942370508&partnerID=8YFLogxK

U2 - 10.1364/AO.53.004023

DO - 10.1364/AO.53.004023

M3 - Article

SN - 1559-128X

SP - 4023

EP - 4032

JO - Applied optics

JF - Applied optics

IS - 18

ER -

Development of a portable deflectometry system for high spatial resolution surface measurements

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this