Effect of annealing conditions on the formation of low-dose SIMOX structures implanted at 190 keV

  • Y. Tan
  • , B. Johnson
  • , S. Seraphin
  • , J. Jiao
  • , M. J. Anc
  • , L. P. Allen

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Effect of annealing conditions on the formation of low-dose SIMOX structures implanted at 190 keV'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science