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Effect of pad surface micro-Texture on dishing and erosion during shallow trench isolation chemical mechanical planarization

  • Xiaoyan Liao
  • , Yun Zhuang
  • , Leonard J. Borucki
  • , Jiang Cheng
  • , Siannie Theng
  • , Toranosuke Ashizawa
  • , Ara Philipossian

Research output: Contribution to journal › Article › peer-review

16   Link opens in a new tab Scopus citations

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