Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube

K. Rykaczewski; M. R. Henry; A. G. Fedorov

doi:10.1063/1.3225553

Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube

K. Rykaczewski
, M. R. Henry
, A. G. Fedorov

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process.

Original language	English (US)
Article number	113112
Journal	Applied Physics Letters
Volume	95
Issue number	11
DOIs	https://doi.org/10.1063/1.3225553
State	Published - 2009
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3225553

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title = "Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube",

abstract = "Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process.",

author = "K. Rykaczewski and Henry, \{M. R.\} and Fedorov, \{A. G.\}",

note = "Funding Information: Semiconductor Research Corporation (GRC Grant No. 2008OJ1864.1281 managed by Dan Herr) and NSF Grant No. DMI 0403671 provided financial support for this work. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.",

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journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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AU - Rykaczewski, K.

AU - Henry, M. R.

AU - Fedorov, A. G.

N1 - Funding Information: Semiconductor Research Corporation (GRC Grant No. 2008OJ1864.1281 managed by Dan Herr) and NSF Grant No. DMI 0403671 provided financial support for this work. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.

PY - 2009

Y1 - 2009

N2 - Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process.

AB - Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process.

UR - https://www.scopus.com/pages/publications/70349503971

UR - https://www.scopus.com/pages/publications/70349503971#tab=citedBy

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VL - 95

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

M1 - 113112

ER -

Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube

Abstract

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