Electron nanodiffraction using sharply focused parallel probes

Christian Dwyer; Angus I. Kirkland; Peter Hartel; Heiko Müller; Maximilian Haider

doi:10.1063/1.2721120

Electron nanodiffraction using sharply focused parallel probes

Christian Dwyer
, Angus I. Kirkland
, Peter Hartel
, Heiko Müller
, Maximilian Haider

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.

Original language	English (US)
Article number	151104
Journal	Applied Physics Letters
Volume	90
Issue number	15
DOIs	https://doi.org/10.1063/1.2721120
State	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2721120

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title = "Electron nanodiffraction using sharply focused parallel probes",

abstract = "The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.",

author = "Christian Dwyer and Kirkland, \{Angus I.\} and Peter Hartel and Heiko M{\"u}ller and Maximilian Haider",

note = "Funding Information: Two of the authors (C.D. and A.I.K.) wish to acknowledge financial support from the EPSRC (Grant No. GR/S83968/01) under the Basic Technology Programme and would like to sincerely thank Y. Kondo, H. Sawada, F. Hosokawa, T. Oikawa, and M. Naruse of JEOL Ltd. for their generous assistance, stimulating discussions and hospitality. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.",

year = "2007",

doi = "10.1063/1.2721120",

language = "English (US)",

volume = "90",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "15",

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TY - JOUR

T1 - Electron nanodiffraction using sharply focused parallel probes

AU - Dwyer, Christian

AU - Kirkland, Angus I.

AU - Hartel, Peter

AU - Müller, Heiko

AU - Haider, Maximilian

N1 - Funding Information: Two of the authors (C.D. and A.I.K.) wish to acknowledge financial support from the EPSRC (Grant No. GR/S83968/01) under the Basic Technology Programme and would like to sincerely thank Y. Kondo, H. Sawada, F. Hosokawa, T. Oikawa, and M. Naruse of JEOL Ltd. for their generous assistance, stimulating discussions and hospitality. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

PY - 2007

Y1 - 2007

N2 - The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.

AB - The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.

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U2 - 10.1063/1.2721120

DO - 10.1063/1.2721120

M3 - Article

SN - 0003-6951

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

M1 - 151104

ER -

Electron nanodiffraction using sharply focused parallel probes

Abstract

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