Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants

Manuel Ballester; Almudena P. Marquez; Eduardo Blanco; Jose M. Manuel; Maria I. Rodriguez-Tapiador; Susana M. Fernandez; Florian Willomitzer; Aggelos K. Katsaggelos; Emilio Marquez

doi:10.1364/COSI.2025.CW3B.7

Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants

Manuel Ballester
, Almudena P. Marquez
, Eduardo Blanco
, Jose M. Manuel
, Maria I. Rodriguez-Tapiador
, Susana M. Fernandez
, Florian Willomitzer
, Aggelos K. Katsaggelos
, Emilio Marquez

James C Wyant Coll Optical Sci

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work presents a spectroscopic ellipsometry analysis of Cu₃N films. We employ a multi-oscillator dispersion model to determine a parameterized complex refractive index, given as a function of film depth, revealing spatially dependent optoelectronic properties.

Original language	English (US)
Title of host publication	Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress
Publisher	Optical Society of America
ISBN (Electronic)	9781557529374
DOIs	https://doi.org/10.1364/COSI.2025.CW3B.7
State	Published - 2025
Event	2025 Computational Optical Sensing and Imaging, COSI 2025 - Seattle, United States Duration: Aug 18 2025 → Aug 21 2025

Publication series

Name	Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress

Conference

Conference	2025 Computational Optical Sensing and Imaging, COSI 2025
Country/Territory	United States
City	Seattle
Period	8/18/25 → 8/21/25

ASJC Scopus subject areas

General Computer Science
Control and Systems Engineering
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

Access to Document

10.1364/COSI.2025.CW3B.7

Cite this

Ballester, M., Marquez, A. P., Blanco, E., Manuel, J. M., Rodriguez-Tapiador, M. I., Fernandez, S. M., Willomitzer, F., Katsaggelos, A. K., & Marquez, E. (2025). Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants. In Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress (Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress). Optical Society of America. https://doi.org/10.1364/COSI.2025.CW3B.7

Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants. / Ballester, Manuel; Marquez, Almudena P.; Blanco, Eduardo et al.
Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress. Optical Society of America, 2025. (Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ballester, M, Marquez, AP, Blanco, E, Manuel, JM, Rodriguez-Tapiador, MI, Fernandez, SM, Willomitzer, F, Katsaggelos, AK & Marquez, E 2025, Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants. in Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress. Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress, Optical Society of America, 2025 Computational Optical Sensing and Imaging, COSI 2025, Seattle, United States, 8/18/25. https://doi.org/10.1364/COSI.2025.CW3B.7

Ballester M, Marquez AP, Blanco E, Manuel JM, Rodriguez-Tapiador MI, Fernandez SM et al. Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants. In Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress. Optical Society of America. 2025. (Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress). doi: 10.1364/COSI.2025.CW3B.7

Ballester, Manuel ; Marquez, Almudena P. ; Blanco, Eduardo et al. / Ellipsometric Characterization of Copper Nitride : Depth Profiling of Optical Constants. Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress. Optical Society of America, 2025. (Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress).

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title = "Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants",

abstract = "This work presents a spectroscopic ellipsometry analysis of Cu3N films. We employ a multi-oscillator dispersion model to determine a parameterized complex refractive index, given as a function of film depth, revealing spatially dependent optoelectronic properties.",

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AU - Fernandez, Susana M.

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T3 - Computational Optical Sensing and Imaging, COSI 2025 in Proceedings Optica Imaging Congress 2025, 3D, DH, COSI, IS, pcAOP, RadIT - Part of Optica Imaging Congress

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ER -

Ellipsometric Characterization of Copper Nitride: Depth Profiling of Optical Constants

Abstract

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ASJC Scopus subject areas

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