Exploiting transport of guest metal ions in a host ionic crystal lattice for nanofabrication: Cu nanopatterning with Ag2S

Keng H. Hsu; Peter L. Schultz; Placid M. Ferreira; Nicholas X. Fang

doi:10.1007/s00339-009-5344-6

Exploiting transport of guest metal ions in a host ionic crystal lattice for nanofabrication: Cu nanopatterning with Ag₂S

Keng H. Hsu, Peter L. Schultz, Placid M. Ferreira, Nicholas X. Fang

Arizona State University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

In this letter we demonstrate the possibility of using the solid ionic conductor Ag₂S for the fabrication of sub-100 nnm features in a Cu film. We also evaluate the physical properties of the Cu-Ag₂S interface through an electroimpedance spectroscopy study. Cu meander lines of 60 nm in width were obtained and the screening length and the surface adatom concentration of Cu on the interface were also evaluated to be 20 nm and 10 ¹²/cm² respectively.

Original language	English (US)
Pages (from-to)	863-868
Number of pages	6
Journal	Applied Physics A: Materials Science and Processing
Volume	97
Issue number	4
DOIs	https://doi.org/10.1007/s00339-009-5344-6
State	Published - Dec 1 2009

ASJC Scopus subject areas

General Chemistry
General Materials Science

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abstract = "In this letter we demonstrate the possibility of using the solid ionic conductor Ag2S for the fabrication of sub-100 nnm features in a Cu film. We also evaluate the physical properties of the Cu-Ag2S interface through an electroimpedance spectroscopy study. Cu meander lines of 60 nm in width were obtained and the screening length and the surface adatom concentration of Cu on the interface were also evaluated to be 20 nm and 10 12/cm2 respectively.",

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AU - Ferreira, Placid M.

AU - Fang, Nicholas X.

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AB - In this letter we demonstrate the possibility of using the solid ionic conductor Ag2S for the fabrication of sub-100 nnm features in a Cu film. We also evaluate the physical properties of the Cu-Ag2S interface through an electroimpedance spectroscopy study. Cu meander lines of 60 nm in width were obtained and the screening length and the surface adatom concentration of Cu on the interface were also evaluated to be 20 nm and 10 12/cm2 respectively.

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Exploiting transport of guest metal ions in a host ionic crystal lattice for nanofabrication: Cu nanopatterning with Ag₂S

Abstract

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