@inproceedings{6a8c7d26d7454443bc9c405395bed8c9,
title = "Extreme Adaptive Optics Testbed: Performance and characterization of a 1024-MEMS deformable mirror",
abstract = "We have demonstrated that a microeloctrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 mu RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast ada.ptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Tostbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especia.lly wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront, control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.",
keywords = "Adaptive Optics, Extreme Adaptive Optics, MEMS",
author = "Evans, \{Julia W.\} and Katie Morzinski and Scott Severson and Lisa Poyneer and Bruce Macintosh and Daren Dillon and Layra Reza and Donald Gavel and David Palmer and Scot Olivier and Paul Bierden",
year = "2006",
doi = "10.1117/12.648977",
language = "English (US)",
isbn = "0819461555",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "MEMS/MOEMS Components and Their Applications III ; Conference date: 23-01-2006 Through 25-01-2006",
}