Feasibility of detecting barrier layer to low-k transition in copper CMP using Raman spectroscopy

S. Kondoju, C. Juncker, P. Lucas, S. Raghavan, P. Fischer, M. Moinpour, A. Oehler

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Feasibility of detecting barrier layer to low-k transition in copper CMP using Raman spectroscopy'. Together they form a unique fingerprint.

Engineering

Chemistry

Physics

Material Science

Keyphrases