Abstract
A wide range of ferroelectric and pyroelectric films have been synthesized using wet chemical processing techniques. With appropriate selection of composition and precursors, and with appropriate use of processing methods to develop desired microstructures, films with exceptional combinations of properties have been prepared. The present paper will provide an overview of recent results obtained in our laboratories on ferroelectric and ZnO films, and on the integration of such films into device structures. Specific discussion will be directed to the effects of chemistry and important processing variables on the structure and properties of the resulting films. Also discussed will be the important aspects of device structures utilizing such films.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 384-396 |
| Number of pages | 13 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3136 |
| DOIs | |
| State | Published - 1997 |
| Event | Sol-Gel Optics IV - San Diego, CA, United States Duration: Jul 30 1997 → Aug 1 1997 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering