Original language | English (US) |
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Article number | 1257923 |
Pages (from-to) | iii |
Journal | Proceedings of the International Conference on Ion Implantation Technology |
Volume | 22-27-September-2002 |
DOIs | |
State | Published - 2002 |
Event | 2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 - Taos, United States Duration: Sep 22 2002 → Sep 27 2002 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics