GaP solid immersion lens based on diffraction

Youngsik Kim; Jun Zhang; Tom D. Milster

doi:10.1143/JJAP.48.03A047

GaP solid immersion lens based on diffraction

Youngsik Kim, Jun Zhang, Tom D. Milster

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A hybrid solid immersion lens system (SIL) is described, in which a spherical glass cap lens, a micro gallium phosphide (micro-GaP) SIL and a diffractive optical element (DOE) are combined. Fabrication and aberration correction mechanisms are discussed.

Original language	English (US)
Article number	03A047
Journal	Japanese Journal of Applied Physics
Volume	48
Issue number	3 PART 2
DOIs	https://doi.org/10.1143/JJAP.48.03A047
State	Published - Mar 2009

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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title = "GaP solid immersion lens based on diffraction",

abstract = "A hybrid solid immersion lens system (SIL) is described, in which a spherical glass cap lens, a micro gallium phosphide (micro-GaP) SIL and a diffractive optical element (DOE) are combined. Fabrication and aberration correction mechanisms are discussed.",

author = "Youngsik Kim and Jun Zhang and Milster, {Tom D.}",

year = "2009",

month = mar,

doi = "10.1143/JJAP.48.03A047",

language = "English (US)",

volume = "48",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - GaP solid immersion lens based on diffraction

AU - Kim, Youngsik

AU - Zhang, Jun

AU - Milster, Tom D.

PY - 2009/3

Y1 - 2009/3

N2 - A hybrid solid immersion lens system (SIL) is described, in which a spherical glass cap lens, a micro gallium phosphide (micro-GaP) SIL and a diffractive optical element (DOE) are combined. Fabrication and aberration correction mechanisms are discussed.

AB - A hybrid solid immersion lens system (SIL) is described, in which a spherical glass cap lens, a micro gallium phosphide (micro-GaP) SIL and a diffractive optical element (DOE) are combined. Fabrication and aberration correction mechanisms are discussed.

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U2 - 10.1143/JJAP.48.03A047

DO - 10.1143/JJAP.48.03A047

M3 - Article

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VL - 48

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 3 PART 2

M1 - 03A047

ER -

GaP solid immersion lens based on diffraction

Abstract

ASJC Scopus subject areas

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