Gas-phase Wafer Cleaning Technology

Jeffery W. Butterbaugh, Anthony J. Muscat

Research output: Chapter in Book/Report/Conference proceeding › Chapter

8 Scopus citations

Original language	English (US)
Title of host publication	Handbook of Silicon Wafer Cleaning Technology
Subtitle of host publication	Second Edition
Publisher	Elsevier Inc.
Pages	269-353
Number of pages	85
ISBN (Electronic)	9780815517733
ISBN (Print)	9780815515548
DOIs	https://doi.org/10.1016/B978-081551554-8.50008-2
State	Published - Jan 10 2008

ASJC Scopus subject areas

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