Abstract
The competing systems for performing RBS and PIXE tend to be large ion beam lines costing millions of dollars, and requiring a great deal of maintenance. The invention is compact and a great deal less expensive, requiring no large evacuated beam line. As discussed, it could be used in a handheld device, a remote or airborne device, or as a desktop model in a semiconductor fabrication plant.
| Original language | English (US) |
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| State | Published - May 19 2004 |