Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Y. Enami; A. K.Y. Jen; G. Meredith; N. Peyghambarian

doi:10.1117/12.537376

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Y. Enami, A. K.Y. Jen, G. Meredith, N. Peyghambarian

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V _π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V _π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V _π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V _π further.

Original language	English (US)
Pages (from-to)	89-96
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5350
DOIs	https://doi.org/10.1117/12.537376
State	Published - 2004
Event	Optical Component and Materials - San Jose, CA, United States Duration: Jan 26 2004 → Jan 27 2004

Keywords

Electro-optic polymer
Fiber-coupling loss
Hybrid modulators
Sol-gel waveguide
Wet etching

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.537376

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Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. / Enami, Y.; Jen, A. K.Y.; Meredith, G. et al.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5350, 2004, p. 89-96.

Research output: Contribution to journal › Conference article › peer-review

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title = "Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides",

abstract = "We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.",

keywords = "Electro-optic polymer, Fiber-coupling loss, Hybrid modulators, Sol-gel waveguide, Wet etching",

author = "Y. Enami and Jen, {A. K.Y.} and G. Meredith and N. Peyghambarian",

year = "2004",

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AU - Enami, Y.

AU - Jen, A. K.Y.

AU - Meredith, G.

AU - Peyghambarian, N.

PY - 2004

Y1 - 2004

N2 - We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

AB - We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V π further.

KW - Electro-optic polymer

KW - Fiber-coupling loss

KW - Hybrid modulators

KW - Sol-gel waveguide

KW - Wet etching

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DO - 10.1117/12.537376

M3 - Conference article

SN - 0277-786X

VL - 5350

SP - 89

EP - 96

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Component and Materials

Y2 - 26 January 2004 through 27 January 2004

ER -

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Abstract

Keywords

ASJC Scopus subject areas

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