In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

D. Moszko; O. Faehnle; C. Vogt; D. Kim

doi:10.1117/12.2596034

In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

D. Moszko, O. Faehnle, C. Vogt, D. Kim

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.

Original language	English (US)
Title of host publication	Eighth European Seminar on Precision Optics Manufacturing
Editors	Oliver Fahnle, Gerald Futterer, Rolf Rascher, Alexander Haberl
Publisher	SPIE
ISBN (Electronic)	9781510645509
DOIs	https://doi.org/10.1117/12.2596034
State	Published - 2021
Event	8th European Seminar on Precision Optics Manufacturing 2021 - Teisnach, Germany Duration: Apr 13 2021 → Apr 14 2021

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11853

Conference

Conference	8th European Seminar on Precision Optics Manufacturing 2021
Country/Territory	Germany
City	Teisnach
Period	4/13/21 → 4/14/21

Keywords

I-tirm
Metrology
Micro roughness measurement
Polishing
Tirm

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2596034

Cite this

Moszko, D., Faehnle, O., Vogt, C., & Kim, D. (2021). In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization. In O. Fahnle, G. Futterer, R. Rascher, & A. Haberl (Eds.), Eighth European Seminar on Precision Optics Manufacturing Article 118530E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11853). SPIE. https://doi.org/10.1117/12.2596034

In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization. / Moszko, D.; Faehnle, O.; Vogt, C. et al.
Eighth European Seminar on Precision Optics Manufacturing. ed. / Oliver Fahnle; Gerald Futterer; Rolf Rascher; Alexander Haberl. SPIE, 2021. 118530E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11853).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Moszko, D, Faehnle, O, Vogt, C & Kim, D 2021, In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization. in O Fahnle, G Futterer, R Rascher & A Haberl (eds), Eighth European Seminar on Precision Optics Manufacturing., 118530E, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11853, SPIE, 8th European Seminar on Precision Optics Manufacturing 2021, Teisnach, Germany, 4/13/21. https://doi.org/10.1117/12.2596034

Moszko D, Faehnle O, Vogt C, Kim D. In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization. In Fahnle O, Futterer G, Rascher R, Haberl A, editors, Eighth European Seminar on Precision Optics Manufacturing. SPIE. 2021. 118530E. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2596034

Moszko, D. ; Faehnle, O. ; Vogt, C. et al. / In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization. Eighth European Seminar on Precision Optics Manufacturing. editor / Oliver Fahnle ; Gerald Futterer ; Rolf Rascher ; Alexander Haberl. SPIE, 2021. (Proceedings of SPIE - The International Society for Optical Engineering).

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In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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