In situ thermomechanical testing for micro/nanomaterials

Wonmo Kang; M. Taher A. Saif

doi:10.1557/mrc.2011.7

In situ thermomechanical testing for micro/nanomaterials

Wonmo Kang, M. Taher A. Saif

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A novel method for the in situ thermomechanical test of micro/nanoscale samples at high temperature is presented. During the in situ test, the stage is resistively heated while the temperature is measured by a cofabricated temperature sensor. For experimental demonstration of the thermomechanical testing method, we fabricate the Micro-Electro-Mechanical Systems (MEMS) stage using silicon carbide (SiC) and carry out in situ uniaxial tests for single-crystal silicon (SCS) microsamples at temperatures from room temperature to 400 °C. We recover the known elastic modulus of SCS within 1% error in this temperature range.

Original language	English (US)
Pages (from-to)	13-16
Number of pages	4
Journal	MRS Communications
Volume	1
Issue number	1
DOIs	https://doi.org/10.1557/mrc.2011.7
State	Published - Nov 2011
Externally published	Yes

ASJC Scopus subject areas

General Materials Science

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10.1557/mrc.2011.7

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AB - A novel method for the in situ thermomechanical test of micro/nanoscale samples at high temperature is presented. During the in situ test, the stage is resistively heated while the temperature is measured by a cofabricated temperature sensor. For experimental demonstration of the thermomechanical testing method, we fabricate the Micro-Electro-Mechanical Systems (MEMS) stage using silicon carbide (SiC) and carry out in situ uniaxial tests for single-crystal silicon (SCS) microsamples at temperatures from room temperature to 400 °C. We recover the known elastic modulus of SCS within 1% error in this temperature range.

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In situ thermomechanical testing for micro/nanomaterials

Abstract

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