Influence of dry and wet cleaning on the properties of rapid thermal grown and deposited gate dielectrics
- Xiaoli Xu
- , Richard T. Kuehn
- , Mehmet C. Öztürk
- , Jimmie J. Wortman
- , Robert J. Nemanich
- , Gari S. Harris
- , Dennis M. Maher
Research output: Contribution to journal › Article › peer-review
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