Instantaneous fluid film imaging in chemical mechanical planarization

Daniel Apone; Caprice Gray; Chris Rogers; Vincent P. Manno; Chris Barns; Mansour Moinpour; Sriram Anjur; Ara Philipossian

doi:10.1557/proc-867-w2.3

Instantaneous fluid film imaging in chemical mechanical planarization

Daniel Apone, Caprice Gray, Chris Rogers, Vincent P. Manno, Chris Barns, Mansour Moinpour, Sriram Anjur, Ara Philipossian

Chemical and Environmental Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.

Original language	English (US)
Article number	W2.3
Pages (from-to)	167-173
Number of pages	7
Journal	Materials Research Society Symposium Proceedings
Volume	867
DOIs	https://doi.org/10.1557/proc-867-w2.3
State	Published - 2005
Event	2005 Materials Research Society Spring Meeting - San Francisco, CA, United States Duration: Mar 28 2005 → Mar 31 2005

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Instantaneous fluid film imaging in chemical mechanical planarization",

abstract = "Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.",

author = "Daniel Apone and Caprice Gray and Chris Rogers and Manno, {Vincent P.} and Chris Barns and Mansour Moinpour and Sriram Anjur and Ara Philipossian",

year = "2005",

doi = "10.1557/proc-867-w2.3",

language = "English (US)",

volume = "867",

pages = "167--173",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

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note = "2005 Materials Research Society Spring Meeting ; Conference date: 28-03-2005 Through 31-03-2005",

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T1 - Instantaneous fluid film imaging in chemical mechanical planarization

AU - Apone, Daniel

AU - Gray, Caprice

AU - Rogers, Chris

AU - Manno, Vincent P.

AU - Barns, Chris

AU - Moinpour, Mansour

AU - Anjur, Sriram

AU - Philipossian, Ara

PY - 2005

Y1 - 2005

N2 - Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.

AB - Dual Emission Laser Induced Fluorescence (DELIF) is employed to attempt to experimentally determine the nature of the lubrication regime in Chemical Mechanical Planarization. Our DELIF setup provides images of the polishing slurry between the wafer and pad. Static images were taken to provide a baseline, then dynamic runs were conducted. Analyzing these images shows that the wafer only contacts the pad in a small number of places around the wafer, mainly due to the pad's topography.

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U2 - 10.1557/proc-867-w2.3

DO - 10.1557/proc-867-w2.3

M3 - Conference article

SN - 0272-9172

VL - 867

SP - 167

EP - 173

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

M1 - W2.3

T2 - 2005 Materials Research Society Spring Meeting

Y2 - 28 March 2005 through 31 March 2005

ER -

Instantaneous fluid film imaging in chemical mechanical planarization

Abstract

ASJC Scopus subject areas

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