Ion projection lithography for resistless patterning of thin magnetic films

W. H. Bruenger, M. Torkler, C. Dzionk, B. D. Terris, L. Folks, D. Weller, H. Rothuizen, P. Vettiger, G. Stangl, W. Fallmann

Research output: Contribution to journal › Conference article › peer-review

12 Scopus citations

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