Original language | English (US) |
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Title of host publication | MEMS |
Subtitle of host publication | Introduction and Fundamentals |
Publisher | CRC Press |
Pages | 10-1-10-46 |
ISBN (Electronic) | 9781420036572 |
ISBN (Print) | 0849391377, 9780849391378 |
State | Published - Jan 1 2005 |
ASJC Scopus subject areas
- General Engineering