Low temperature ECR-CVD of (Ba,Sr)TiO 3 films

Prasad Alluri; Derek Tang; Sandwip Dey

Low temperature ECR-CVD of (Ba,Sr)TiO ₃ films

Prasad Alluri, Derek Tang, Sandwip Dey

Chemical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

This paper reports the deposition of polycrystalline SrTiO ₃ at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO ₃ thin films at low temperatures is hindered by the formation of the BaCO ₃ phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments.

Original language	English (US)
Title of host publication	Integrated Ferroelectrics
Pages	145-154
Number of pages	10
Volume	18
Edition	1-4
State	Published - 1998

Keywords

(Ba,Sr)TiO
CVD
Direct liquid injection
ECR
Phase stability diagram
SrTiO

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Physics and Astronomy (miscellaneous)
Condensed Matter Physics

Cite this

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title = "Low temperature ECR-CVD of (Ba,Sr)TiO 3 films",

abstract = "This paper reports the deposition of polycrystalline SrTiO 3 at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO 3 thin films at low temperatures is hindered by the formation of the BaCO 3 phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments. ",

keywords = "(Ba,Sr)TiO, CVD, Direct liquid injection, ECR, Phase stability diagram, SrTiO",

author = "Prasad Alluri and Derek Tang and Sandwip Dey",

year = "1998",

language = "English (US)",

volume = "18",

pages = "145--154",

booktitle = "Integrated Ferroelectrics",

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T1 - Low temperature ECR-CVD of (Ba,Sr)TiO 3 films

AU - Alluri, Prasad

AU - Tang, Derek

AU - Dey, Sandwip

PY - 1998

Y1 - 1998

N2 - This paper reports the deposition of polycrystalline SrTiO 3 at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO 3 thin films at low temperatures is hindered by the formation of the BaCO 3 phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments.

AB - This paper reports the deposition of polycrystalline SrTiO 3 at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO 3 thin films at low temperatures is hindered by the formation of the BaCO 3 phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments.

KW - (Ba,Sr)TiO

KW - CVD

KW - Direct liquid injection

KW - ECR

KW - Phase stability diagram

KW - SrTiO

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M3 - Chapter

VL - 18

SP - 145

EP - 154

BT - Integrated Ferroelectrics

ER -

Low temperature ECR-CVD of (Ba,Sr)TiO ₃ films

Abstract

Keywords

ASJC Scopus subject areas

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