Mechanical properties of indium tin oxide on polyethylene napthalate substrate

S. Bhagat, Y. Zoo, H. Han, J. Lewis, S. Grego, K. Lee, S. Iyer, Terry Alford

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.

Original languageEnglish (US)
Title of host publication2007 MRS Spring Meeting
PublisherMaterials Research Society
Number of pages6
ISBN (Print)9781558999725
StatePublished - 2007
Event2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings


Conference2007 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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