Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

A. Gruverman; B. J. Rodriguez; A. I. Kingon; R. J. Nemanich; A. K. Tagantsev; J. S. Cross; M. Tsukada

doi:10.1063/1.1593830

Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

A. Gruverman, B. J. Rodriguez, A. I. Kingon, R. J. Nemanich, A. K. Tagantsev, J. S. Cross, M. Tsukada

Research output: Contribution to journal › Article › peer-review

231 Scopus citations

Abstract

A study was performed on mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. The piezoresponse force microscopic technique was used for the purpose. It was found that the mechanical stress caused elastic switching in capacitors.

Original language	English (US)
Pages (from-to)	728-730
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	4
DOIs	https://doi.org/10.1063/1.1593830
State	Published - Jul 28 2003
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors",

abstract = "A study was performed on mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. The piezoresponse force microscopic technique was used for the purpose. It was found that the mechanical stress caused elastic switching in capacitors.",

author = "A. Gruverman and Rodriguez, {B. J.} and Kingon, {A. I.} and Nemanich, {R. J.} and Tagantsev, {A. K.} and Cross, {J. S.} and M. Tsukada",

year = "2003",

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doi = "10.1063/1.1593830",

language = "English (US)",

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AU - Gruverman, A.

AU - Rodriguez, B. J.

AU - Kingon, A. I.

AU - Nemanich, R. J.

AU - Tagantsev, A. K.

AU - Cross, J. S.

AU - Tsukada, M.

PY - 2003/7/28

Y1 - 2003/7/28

N2 - A study was performed on mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. The piezoresponse force microscopic technique was used for the purpose. It was found that the mechanical stress caused elastic switching in capacitors.

AB - A study was performed on mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. The piezoresponse force microscopic technique was used for the purpose. It was found that the mechanical stress caused elastic switching in capacitors.

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U2 - 10.1063/1.1593830

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 4

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Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

Abstract

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