Micro- and Nano-assembly and Manipulation Techniques for MEMS

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.

Original languageEnglish (US)
Title of host publicationCISM International Centre for Mechanical Sciences, Courses and Lectures
PublisherSpringer International Publishing
Pages135-156
Number of pages22
DOIs
StatePublished - 2006

Publication series

NameCISM International Centre for Mechanical Sciences, Courses and Lectures
Volume478

Keywords

  • Dielectric Layer
  • Filling Ratio
  • Manipulation Technique
  • Shape Memory Alloy
  • Uterine Artery Embolization

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanics of Materials
  • Mechanical Engineering
  • Computer Science Applications

Fingerprint

Dive into the research topics of 'Micro- and Nano-assembly and Manipulation Techniques for MEMS'. Together they form a unique fingerprint.

Cite this