Microtags with 150-nm line gratings fabricated by use of extreme-ultraviolet lithography
- M. R. Descour
- , D. I. Simon
- , W. C. Sweatt
- , M. E. Warren
- , S. H. Kravitz
- , K. D. Krenz
- , A. K. Ray-Chaudhuri
- , R. H. Stulen
Research output: Contribution to journal › Article › peer-review