Abstract
The experimental data for the anistropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cosnd dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 9-12 |
| Number of pages | 4 |
| Journal | Electrocomponent Science and Technology |
| Volume | 6 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1979 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering