Abstract
We report our fabrication of nanoscale devices using electron beam and nanoimprint lithography (NIL). We focus our study in the emerging fields of NIL, nanophotonics and nanobiotechnology and give a few examples as to how these nanodevices may be applied toward genomic and proteomic applications for molecular analysis. The examples include reverse NIL-fabricated nanofluidic channels for DNA stretching, nanoscale molecular traps constructed from dielectric constrictions for DNA or protein focusing by dielectrophoresis, multi-layer nanoburger and nanoburger multiplets for optimized surface-plasma enhanced Raman scattering for protein detection, and biomolecular motor-based nanosystems. The development of advanced nanopatterning techniques promises reliable and high-throughput manufacturing of nanodevices which could impact significantly on the areas of genomics, proteomics, drug discovery and molecular clinical diagnostics.
Original language | English (US) |
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Article number | 35 |
Pages (from-to) | 183-192 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5592 |
DOIs | |
State | Published - 2005 |
Event | Nanofabrication: Technologies, Devices, and Applications - Philadelphia, PA, United States Duration: Oct 25 2004 → Oct 28 2004 |
Keywords
- Biomotors
- Biosensors
- Dielectrophoresis
- Genomics
- Nanofabrication
- Nanofluidics
- Nanoimprint lithography
- Nanophotonics
- Proteomics
- SERS
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering