Abstract
The solid immersion lens (SIL) and modified liquid immersion lens (MLIL) using a GaP lens resolve the 400 nm pitch periodical structure are demonstrated. The edge response of the MLIL is 300 nm, which is approximately 1/3 as small as that of conventional objective lens. The amorphous marks, 200 nm in diameter, can be recorded and read by the MLIL and a red semiconductor laser.
Original language | English (US) |
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Pages (from-to) | 361-363 |
Number of pages | 3 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3864 |
State | Published - 1999 |
Event | Proceedings of the 1999 Joint International Symposium on Optical Memory and Optical Optical Data Storage (ISOM/ODS'99) - Koloa, HI, USA Duration: Jul 12 1999 → Jul 15 1999 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering