Phase-locked substrate rotation: New applications for RHEED in MBE growth

W. Braun; H. Möller; Yong-Hang Zhang

doi:10.1016/S0022-0248(98)01277-9

Phase-locked substrate rotation: New applications for RHEED in MBE growth

W. Braun
, H. Möller
, Yong-Hang Zhang

Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.

Original language	English (US)
Pages (from-to)	50-55
Number of pages	6
Journal	Journal of Crystal Growth
Volume	201
DOIs	https://doi.org/10.1016/S0022-0248(98)01277-9
State	Published - May 1999
Event	Proceedings of the 1998 10th International Conference on Molecular Beam Epitaxy (MBE-X) - Cannes Duration: Aug 31 1998 → Sep 4 1998

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/S0022-0248(98)01277-9

Cite this

@article{c4fe2ee660894c3082dbbd77723fe05c,

title = "Phase-locked substrate rotation: New applications for RHEED in MBE growth",

abstract = "By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.",

author = "W. Braun and H. M{\"o}ller and Yong-Hang Zhang",

note = "Funding Information: The authors would like to thank C.-H. Kuo for some MBE growth. This work was supported by a DARPA program (contract number MDA972-95-1-0016) managed by G. Pomrenke.; Proceedings of the 1998 10th International Conference on Molecular Beam Epitaxy (MBE-X) ; Conference date: 31-08-1998 Through 04-09-1998",

year = "1999",

month = may,

doi = "10.1016/S0022-0248(98)01277-9",

language = "English (US)",

volume = "201",

pages = "50--55",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Phase-locked substrate rotation

T2 - Proceedings of the 1998 10th International Conference on Molecular Beam Epitaxy (MBE-X)

AU - Braun, W.

AU - Möller, H.

AU - Zhang, Yong-Hang

N1 - Funding Information: The authors would like to thank C.-H. Kuo for some MBE growth. This work was supported by a DARPA program (contract number MDA972-95-1-0016) managed by G. Pomrenke.

PY - 1999/5

Y1 - 1999/5

N2 - By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.

AB - By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.

UR - https://www.scopus.com/pages/publications/0344614028

UR - https://www.scopus.com/pages/publications/0344614028#tab=citedBy

U2 - 10.1016/S0022-0248(98)01277-9

DO - 10.1016/S0022-0248(98)01277-9

M3 - Conference article

SN - 0022-0248

VL - 201

SP - 50

EP - 55

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

Y2 - 31 August 1998 through 4 September 1998

ER -

Phase-locked substrate rotation: New applications for RHEED in MBE growth

Abstract

ASJC Scopus subject areas

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