@inproceedings{2babfb2368b44420a0c3bf86d2dafd44,
title = "Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material",
abstract = "We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures.",
keywords = "CMOS compatible fabrication, Optical Coupler, micro optics, silicon photonics, waveguide",
author = "Chris Summitt and Sunglin Wang and Lee Johnson and Melissa Zaverton and Tao Ge and Tom Milster and Yuzuru Takashima",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII ; Conference date: 08-02-2015 Through 11-02-2015",
year = "2015",
doi = "10.1117/12.2080425",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Schoenfeld, {Winston V.} and {von Freymann}, Georg and Rumpf, {Raymond C.}",
booktitle = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII",
}