Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material

Chris Summitt; Sunglin Wang; Lee Johnson; Melissa Zaverton; Tao Ge; Tom Milster; Yuzuru Takashima

doi:10.1117/12.2080425

Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material

Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tao Ge, Tom Milster, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures.

Original language	English (US)
Title of host publication	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Editors	Winston V. Schoenfeld, Georg von Freymann, Raymond C. Rumpf
Publisher	SPIE
ISBN (Electronic)	9781628414646
DOIs	https://doi.org/10.1117/12.2080425
State	Published - 2015
Event	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII - San Francisco, United States Duration: Feb 8 2015 → Feb 11 2015

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9374

Conference

Conference	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Country/Territory	United States
City	San Francisco
Period	2/8/15 → 2/11/15

Keywords

CMOS compatible fabrication
Optical Coupler
micro optics
silicon photonics
waveguide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2080425

Cite this

Summitt, C., Wang, S., Johnson, L., Zaverton, M., Ge, T., Milster, T., & Takashima, Y. (2015). Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material. In W. V. Schoenfeld, G. von Freymann, & R. C. Rumpf (Eds.), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII Article 937415 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9374). SPIE. https://doi.org/10.1117/12.2080425

Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material. / Summitt, Chris; Wang, Sunglin; Johnson, Lee et al.
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII. ed. / Winston V. Schoenfeld; Georg von Freymann; Raymond C. Rumpf. SPIE, 2015. 937415 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9374).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Summitt, C, Wang, S, Johnson, L, Zaverton, M, Ge, T, Milster, T & Takashima, Y 2015, Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material. in WV Schoenfeld, G von Freymann & RC Rumpf (eds), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII., 937415, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9374, SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, San Francisco, United States, 2/8/15. https://doi.org/10.1117/12.2080425

Summitt C, Wang S, Johnson L, Zaverton M, Ge T, Milster T et al. Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material. In Schoenfeld WV, von Freymann G, Rumpf RC, editors, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII. SPIE. 2015. 937415. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2080425

Summitt, Chris ; Wang, Sunglin ; Johnson, Lee et al. / Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII. editor / Winston V. Schoenfeld ; Georg von Freymann ; Raymond C. Rumpf. SPIE, 2015. (Proceedings of SPIE - The International Society for Optical Engineering).

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Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material

Abstract

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Keywords

ASJC Scopus subject areas

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