Quantitative analysis using sputtered neutrals in a secondary ion microanalyser

Peter Williams; Lori A. Streit

doi:10.1016/0168-583X(86)90274-0

Quantitative analysis using sputtered neutrals in a secondary ion microanalyser

Peter Williams
, Lori A. Streit

Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Abstract

We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar⁺ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.

Original language	English (US)
Pages (from-to)	159-164
Number of pages	6
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	15
Issue number	1-6
DOIs	https://doi.org/10.1016/0168-583X(86)90274-0
State	Published - Apr 1 1986

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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@article{691ea1e1b5aa40e7a7354c4a88c7a205,

title = "Quantitative analysis using sputtered neutrals in a secondary ion microanalyser",

abstract = "We have developed a technique for quantitative analysis of major element levels (> 1\%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.",

author = "Peter Williams and Streit, \{Lori A.\}",

note = "Funding Information: This work was supported by the National Science Foundation under Grant DMR 8206028.A lGaAs samples and analyses were kindly supplied by Ron Roedel (ASU). TaSi samples and analysesw ere supplied by S.S. Lau (UC San Diego). We appreciate the assistance of Rick Hervig and Greg Gillen.",

year = "1986",

month = apr,

day = "1",

doi = "10.1016/0168-583X(86)90274-0",

language = "English (US)",

volume = "15",

pages = "159--164",

journal = "Nuclear Inst. and Methods in Physics Research, B",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-6",

}

TY - JOUR

T1 - Quantitative analysis using sputtered neutrals in a secondary ion microanalyser

AU - Williams, Peter

AU - Streit, Lori A.

N1 - Funding Information: This work was supported by the National Science Foundation under Grant DMR 8206028.A lGaAs samples and analyses were kindly supplied by Ron Roedel (ASU). TaSi samples and analysesw ere supplied by S.S. Lau (UC San Diego). We appreciate the assistance of Rick Hervig and Greg Gillen.

PY - 1986/4/1

Y1 - 1986/4/1

N2 - We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.

AB - We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.

UR - https://www.scopus.com/pages/publications/0022040496

UR - https://www.scopus.com/pages/publications/0022040496#tab=citedBy

U2 - 10.1016/0168-583X(86)90274-0

DO - 10.1016/0168-583X(86)90274-0

M3 - Article

SN - 0168-583X

VL - 15

SP - 159

EP - 164

JO - Nuclear Inst. and Methods in Physics Research, B

JF - Nuclear Inst. and Methods in Physics Research, B

IS - 1-6

ER -

Quantitative analysis using sputtered neutrals in a secondary ion microanalyser

Abstract

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